Vertical two-door distilled dry vacuum sputtering machine steamed
Features:
- The furnace may be around individual steamed.
- Evaporation deposition process with a choice of groups 4.
- For RF or sputtering target.
- The rotation of the turning mechanism using the public mode, the curvature for steamed product, can achieve excellent uniformity effect.
Use:
- phone cases / keys / PDA.
- Other information products shell / car rearview mirror.
- metallized decorative products and steamed NCVM.
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Systems / models |
LP- 1200 BPSD |
LP- 1500 BPSD |
LP- 1600 BPSD |
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The cavity size |
diameter |
1,200 mm |
1,500 mm |
1,600 mm |
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height |
1,300 mm |
1,500 mm |
1,600 mm |
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Dimensions can be deposited |
- |
∮135x1,050mm x18 |
∮135x1,250mmx24 |
∮135x1,350mmx26 |
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Ultimate vacuum |
- |
10-6 Torr |
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Exhaust velocity |
- |
From 1 atmosphere to about 15 minutes 5x10-5 Torr (when the empty furnace) |
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Windows |
- |
Group 1 |
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Number of tungsten |
- |
18 to 22 |
20 to 24 |
20 to 26 |
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Rotary pump |
Liters / min |
6000 |
10,000 |
15,000 |
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Strengthen Pump |
M3 / hour |
1,500 |
3,000 M3 / hour |
5,000 |
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Diffusion pump |
Liters / sec |
45,000 |
45,000 |
45,000 * 2 |
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Maintain pump |
With recommendations |
300 to 600 liters / min |
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Film thickness gauge |
Quartz type Film thickness gauge |
Monolithic sensor head / six sensing head |
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Vacuum gauge |
- |
Pirani + Cold Cathode (1 ATM ~ 10-6 Torr) |
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control box |
- |
Group 1 |
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Sputtering Targets |
- |
2 to 4 |
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Sputter source |
- |
RF or DC |
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Operation method |
- |
automatic / manual |
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Cooling water flow |
Liters / min |
80 |
100 |
120 |
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Power steamed |
- |
30KW |
35KW |
50KW |
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High vacuum valve |
- |
24 inches |
36 inches |
36 inches |
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Roughing valve |
- |
6 inches |
6 inches |
8 inches |
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Pre-drainage valve |
- |
6 inches |
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Release valve |
- |
2 inches |
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Maintaining valve |
- |
1 inch |
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Vacuum gauge |
- |
Pirani + Cold Cathode (1 ATM ~ 10-6 Torr) |
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cooling tower |
- |
15RT (pressure: 4Kg / cm2, pressure: 2Kg / cm2) |
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Cooling water temperature |
- |
Recommendations into the water 18 ℃, water 25 ℃, standard temperature 20 ± 1 ℃ |
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Ultra-low temperature freezers |
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Ultra-low temperature freezers -110 ~ -140 ℃ (environmentally friendly refrigerant) Further optional |
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Air Compressor |
- |
Of 3HP (air pressure: 6 ~ 8 Kg / cm2 |
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Power required |
- |
75KW |
85KW |
95KW |
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Environmental needs |
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One hundred thousand clean room; Epoxy plane of the floor; air conditioning; temperature 25 ± 3 ℃; humidity 50 ± 10% |
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