COATING MATERIALS

CANON OPTRON	MgF2 / SiO / SiO2 / S5F / Al2O3 / OM-4 / Ta2O5 / OS-50 Surfclear100 etc.
High Index	TiO2 / Ti3O5 / ZrO2 / ZnS / Ta2O5 / Nb2O5 etc.
Medium Index	Al2O3 / MgO etc.
Low Index	MgF2 / SiO2 etc.
Mixture	LB-3 / ITO / OM type / OS type / OH type etc.
AR Coating	AF.AS tablets / Super Hydrophobic etc.
Consumables	BOAT(MO/TA/W) / TungstenFilament / Aluminum / Crucible etc.

 

PUMP OIL

LEYBONOL	LVO-100 / LVO-130 / LVO-210
EDWARDS	Ultragrade 20/40
MORESCO	MR-100 / MR-200 / MR-200A / MR-250 / MR-250A
HIVAC	Silicon oil
DOW CORNING	Vacuum Grease
LION	Lion-A / Lion-S

 

CRYSTALS

MAXTEK	6MHz(Gold/Alloy) / 5MHz(Gold/Alloy)
INFICON	6MHz(Gold/Alloy) / 5MHz(Gold/Alloy)
LP	6MHz(Gold/Alloy) / 5MHz(Gold/Alloy)
FIL-TECH	QI-8010 / QI-8008

 

THIN FILM CONTROLLER

INFICON

XTC/3S、XTC/3M、IC6、SQM-160

 

SENSOR

JEOL	RotarySensorHead(6 points / 12 points)
INFICON	SingleSensorHead / DualSensorHead etc.

 

POWER SUPPLY

MF	(GERMAN) J.Schneider / (U.S.A) AE
RF	(U.S.A) AE / (JAPAN) JEOL

 

ION SOURCE(IAD)

VEECO	End Hall ION Source / RF ION Source
KRI	End Hall ION Source / RF ION Source
PPG	RF ION Source

 

E BEAM

PLASMATECH	6KW / 10KW / 15KW
JEOL	3KW/ 6KW/ 10KW / 16KW

 

ULTRA-LOW-TEMPERATURE REFRIGERATOR

POLYCOLD	PFC-552 / PFC-672 / MAXCOOL 4000H
SHINMAYWA	NEOCOLD RCT762
LP	LP-150-050 / LP-150-075 / LP-150-100

 

VACUUM PUMP

LEYBOLD	SV series / WAU series etc.
EDWARDS	EH series / E2M175 / E2M275 etc.
OSAKA	P600 / P901 / Tgkine series etc.
PFEIFFER	WKP series etc.
SHINKO	SMB series / SR series etc.