長壽命燈絲 適合長期生產

 

G 12700 01

 

仕 様

型號

G-12600

G-12700

最大輸出功率

10kW  (10kV – 1A)

加速電圧

-4kV  ~ -10kV

電子束偏轉角

270°

偏轉方式

電磁鐵

永磁體

掃描範圍

±20mm

位置移動範圍

±20mm

坩堝

工作壓力

7×10-2  Pa以下

冷卻水流量

10 L/min以上

(水溫15~25℃,壓差0.2~0.35MPa)

外形尺寸(mm)

182(W)×174(D)×188(H)

(不包括水嘴,突出物和水管)

182(W)×168(D)×188(H)

(不包括水嘴,突出物和水管)

重量

約10kg

配備帶水冷塊的高效背散射電子阱

  • 降低基板溫度上升
  • 由於反射的電子流入而導致的基板損傷減少
G 11000 01  G 11000 02 

 

仕 様

型號

G-11000

G-11004/G-11006

最大輸出功率

10kW  (10kV – 1A)

加速電圧

-4kV  ~ -10kV

電子束偏轉角

270°

偏轉方式

永磁體

掃描範圍

±25mm

位置移動範圍

±25mm

坩堝

4或6點 12mL

工作壓力

5×10-5  ~ 7×10-2  Pa

冷卻水流量

10 L/min以上

(水溫15~25℃,壓差0.2~0.35MPa)

外形尺寸(mm)

216(W)×318(D)×141(H)

(不包括水嘴,突出物和水管)

216(W)×339(D)×141(H)

(不包括水嘴,突出物和水管)

重量

約10kg

約35kg

 

Electron gun

Feature:

  1. An electron gun generating an electron beam by 270 degrees toward the emitting surface of the evaporator thereof, the combination of the electromagnetic coil into the scanning device scans evaporated.
  2. Electron gun sturdy body structure, easy maintenance.
  3. Using an electron gun part from the body and the crucible technique, based on a combination of self-use.

 

The newly developed electron gun G-12400

Feature:

  • Of the incident electron beam perpendicularly improved (improvement solubilizing trace)
  • X / Y-axis scanning electron beam ± 20mm
  • Since reducing reflected electron beam is incident to the substrate of the film reduces the extent of damage
  • Because a solenoid can change the accelerating voltage
  • Inhibition life hinder promoter / enhance of the anode plate
  • Can previous exchange type G-12100

 

 

Feature

  • May be combined in a variety of electronic manufacturing tip PLASMATECH
  • Alternatively Group 1 or Group 2 of the electron gun electron gun power supply
  • In the high voltage output of the safety, security structure having a weight 2
  • Effect of loading so that abnormal discharge is reduced to a minimum means
  • With a variety of features to choose from
  1. The digital display displays visual
  2. May be transformed with the acceleration voltage for accelerating voltage conversion function film, has 3 and the acceleration voltage is set for each acceleration voltage is set to 2 groups RBI
  3. Scanning function increase more annular shaped like sample uniformity RBI 12 may be designed in a triangular waveform and the helical type waveforms may change the scanning frequency of the electron beam

Specifications:

Item Content
Maximum output power D-10A and D-10B :10kW
D-06A and D-06B :6kW
Accelerating voltage D-10A and D-10B :-4kV~ -10kV
D-06A and D-06B :-4kV~ -6kV
Loaded gun Single gun:D-10A and D-06A
Double gun:D-10B and D-06B
External control signal About 35
Dimensions Power:W563xH1232xD803(mm)
Monitor:W480xH99xD150(mm)
(Monitor is select item)
Weight D-10A and D-10B :about 290kg
D-06A and D-06B :about 260kg

 

21A en

Copyright © 2017. Lung Pien Rights Reserved Vacuum Industry Co., Ltd. All.
No.2 Datong Road, Wuchi District, Taichung City (Chungkang Export Processing Zone) 
Service E -mail: service@lp-vacuum.com.tw Business Consulting E -mail: sale@lp-vacuum.com.tw

LP Catalog

VisitorsVisitors195100