配備帶水冷塊的高效背散射電子阱

• 降低基板溫度上升
• 由於反射的電子流入而導致的基板損傷減少

Electron gun

Feature：

1. An electron gun generating an electron beam by 270 degrees toward the emitting surface of the evaporator thereof, the combination of the electromagnetic coil into the scanning device scans evaporated.
2. Electron gun sturdy body structure, easy maintenance.
3. Using an electron gun part from the body and the crucible technique, based on a combination of self-use.

The newly developed electron gun G-12400

Feature:

• Of the incident electron beam perpendicularly improved (improvement solubilizing trace)
• X / Y-axis scanning electron beam ± 20mm
• Since reducing reflected electron beam is incident to the substrate of the film reduces the extent of damage
• Because a solenoid can change the accelerating voltage
• Inhibition life hinder promoter / enhance of the anode plate
• Can previous exchange type G-12100

Feature

• May be combined in a variety of electronic manufacturing tip PLASMATECH
• Alternatively Group 1 or Group 2 of the electron gun electron gun power supply
• In the high voltage output of the safety, security structure having a weight 2
• Effect of loading so that abnormal discharge is reduced to a minimum means
• With a variety of features to choose from

1. The digital display displays visual
2. May be transformed with the acceleration voltage for accelerating voltage conversion function film, has 3 and the acceleration voltage is set for each acceleration voltage is set to 2 groups RBI
3. Scanning function increase more annular shaped like sample uniformity RBI 12 may be designed in a triangular waveform and the helical type waveforms may change the scanning frequency of the electron beam

Specifications: