The double door upright vacuum evaporation machine
Features:
- Around the furnace may be individually evaporated
- The process steam has a choice of groups 4
- It can be installed or RF sputtering target
- With plasma polymerized (HMDS) surface processing module, process environmentally friendly, low pollution, but also needs to meet the surface of the product water blocking, and other gas barrier or hydrophobic property requirements, in order to increase the added value of the product.
Use:
- Decoration products / car lampshade / alloy tire rims / cosmetic containers
- Perfume bottle / mirror / electrical components / steamed and the metalization of NCVM
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Systems / models |
LP-1300 BSD |
LP-1600 BSD |
LP-1800 BSD |
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The cavity size |
diameter |
1300 mm |
1600mm |
1800mm |
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height |
1300 mm ~ 1800 mm |
1600 mm ~ 2000 mm |
1600 mm ~ 2200 mm |
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Dimensions can be deposited |
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∮375x1,400 mm x6 |
∮380x1,700 mm x8 ∮450x1,700 mm x6 |
∮400x1,700 mm x8 ∮540x1,700 mm x6 |
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Ultimate vacuum |
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10-6 Torr |
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Exhaust velocity |
- |
1 (empty furnace) 5x10-5 Torr to atmospheric pressure for about 15 minutes |
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Windows |
- |
Group 1 |
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Number of tungsten |
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18 to 22 |
20 to 26 |
20 to 26 |
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Rotary pump |
Liters / min |
6,000 to 10,000 |
8,500 to 15,000 |
15,000 |
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Strengthen Pump |
M3 / hour |
1,500 to 3,000 |
2,000 to 5,000 |
4,000 to 6,000 |
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Diffusion pump |
Liters / sec |
45,000 |
45,000 |
45,000 * 2 |
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Maintain pump |
(With suggestions) |
300 to 600 liters / min |
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Vacuum gauge |
- |
Pirani + Cold Cathode (1 ATM ~ 10-6 Torr) |
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control box |
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Group 1 |
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High vacuum valve |
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28 to 36 inches |
36 inches |
36 inches |
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Roughing valve |
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6 inches |
8 inches |
10 inches |
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Pre-drainage valve |
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6 inches |
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Release valve |
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2 inches |
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Maintaining valve |
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1 inch |
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Power steamed |
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30KW |
50KW |
75KW |
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Operation method |
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automatic / manual |
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Cooling water flow |
- |
100 liters / min |
120 liters / min |
150 liters / min |
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cooling system |
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15 RT (pressure: 4Kg / cm2, pressure: 2Kg / cm2) |
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Cooling water temperature |
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Recommendations into the water 18 ℃, water 25 ℃, standard temperature 20 ± 1 ℃ |
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Ultra-low temperature freezers |
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Additional Choice |
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RF plasma generator |
- |
Additional Choice |
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Air Compressor |
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3HP ~ 5HP (air pressure: 6 ~ 8 Kg / cm2) |
Pneumatic: 8 Kg / cm2 |
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Power control system |
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PLC |
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Ultra-low temperature refrigeration systems |
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-110 ~ -140 ℃ (otherwise optional) |
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Power required |
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75KW |
95KW |
105KW |
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