LP-BSPD

Vertical two-door distilled dry vacuum sputtering machine steamed

Features:

  1. The furnace may be around individual steamed.
  2. Evaporation deposition process with a choice of groups 4.
  3. For RF or sputtering target.
  4. The rotation of the turning mechanism using the public mode, the curvature for steamed product, can achieve excellent uniformity effect.

Use:

  1. phone cases / keys / PDA.
  2. Other information products shell / car rearview mirror.
  3. metallized decorative products and steamed NCVM.

Systems / models

LP- 1200 BPSD

LP- 1500 BPSD

LP- 1600 BPSD

The cavity size

diameter

1,200 mm

1,500 mm

1,600 mm

height

1,300 mm

1,500 mm

1,600 mm

Dimensions can be deposited

-

∮135x1,050mm x18

∮135x1,250mmx24

∮135x1,350mmx26

Ultimate vacuum

-

10-6 Torr

Exhaust velocity

-

From 1 atmosphere to about 15 minutes 5x10-5 Torr (when the empty furnace)

Windows

-

Group 1

Number of tungsten

-

18 to 22

20 to 24

20 to 26

Rotary pump

Liters / min

6000

10,000

15,000

Strengthen Pump

M3 / hour

1,500

3,000 M3 / hour

5,000

Diffusion pump

Liters / sec

45,000

45,000

45,000 * 2

Maintain pump

With recommendations

300 to 600 liters / min

Film thickness gauge

Quartz type

Film thickness gauge

Monolithic sensor head / six sensing head

Vacuum gauge

-

Pirani + Cold Cathode (1 ATM ~ 10-6 Torr)

control box

-

Group 1

Sputtering Targets

-

2 to 4

Sputter source

-

RF or DC

Operation method

-

automatic / manual

Cooling water flow

Liters / min

80

100

120

Power steamed

-

30KW

35KW

50KW

High vacuum valve

-

24 inches

36 inches

36 inches

Roughing valve

-

6 inches

6 inches

8 inches

Pre-drainage valve

-

6 inches

Release valve

-

2 inches

Maintaining valve

-

1 inch

Vacuum gauge

-

Pirani + Cold Cathode (1 ATM ~ 10-6 Torr)

cooling tower

-

15RT (pressure: 4Kg / cm2, pressure: 2Kg / cm2)

Cooling water temperature

-

Recommendations into the water 18 ℃, water 25 ℃, standard temperature 20 ± 1 ℃

Ultra-low temperature freezers

-

Ultra-low temperature freezers -110 ~ -140 ℃ (environmentally friendly refrigerant) Further optional

Air Compressor

-

Of 3HP (air pressure: 6 ~ 8 Kg / cm2

Power required

-

75KW

85KW

95KW

Environmental needs

-

One hundred thousand clean room; Epoxy plane of the floor; air conditioning; temperature 25 ± 3 ℃; humidity 50 ± 10%

 

 

21A en

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No.2 Datong Road, Wuchi District, Taichung City (Chungkang Export Processing Zone) 
Service E -mail: service@lp-vacuum.com.tw Business Consulting E -mail: sale@lp-vacuum.com.tw

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