Features:
- English user interface easy and convenient.
- Under computer control, with high reproducibility.
- Thick high-performance optical monitor in conjunction with a computer, can reach ultra-high-precision optical thick.
- Can be installed RF Ion source or Plasma Gun Ion Source for the high-order optical film vapor process.
- Installation of automatic reverse mechanism works industry steaming time can be shortened, to achieve high productivity and reduce production costs.
- Steamed automation system can enhance the production management personnel and reduce training time.
use:
- Monocular / digital camera lens
- Monitor / projector lens
- Color filter / mirror
- IR / UV filters
- AR Coating
- Cell phone camera
- Monitor & readhead lens DVD
Systems / models |
LP-900 EBA |
LP-1100 EBA |
LP-1300 EBA |
|
size |
Diameter size |
900 mm |
1100 mm |
1300 mm |
Fixture size |
∮820 mm |
∮950 mm |
∮1200 mm |
|
Main Performance |
Ultimate vacuum |
10-7 Torr / 10-5 Pa |
||
Operation of the vacuum degree |
(Empty furnace) 1 atmosphere to 2x10-5 Torr (2.7X10-3 Pa) for about 30 minutes |
|||
Substrate temperature |
350 deg.] C (max) |
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Exhaust System |
Rotary pump |
3,000 liters / minute |
3,000 liters / minute |
3,000 liters / minute |
Strengthen Pump |
600 M3 / hour |
600 M3 / hour |
1,500 M3 / hour |
|
Diffusion pump |
20,000 liters / sec x 1 |
15,000 liters / sec x 2 |
45,000 liters / sec x 1 |
|
Ultra-low temperature freezers |
-110 ~ -140 ℃ |
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Heating system |
Micro-heater |
12KW |
12KW |
24KW |
Film thickness gauge |
Optical film thickness meter |
LP film thickness meter wide wave region 380mm ~ 1,050mm |
||
Quartz film thickness meter |
Monolithic sensor head / six sensing head |
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Vacuum gauge |
- |
Pirani + Cold Cathode (1ATM ~ 10-9 Torr / 1ATM ~ 10-7 Pa) |
||
Evaporation source |
Electron gun |
Plasmatech 6KW / 10KW |
||
Resistance heating |
3KW |
6KW |
6KW |
|
Rotary way |
- |
A planetary or revolving formula |
||
source of ion |
- |
Also optional |
||
cooling system |
- |
Pressure: 4Kg / cm2, pressure: 2Kg / cm2 |
||
Cooling water flow |
Liters / minute |
80 |
100 |
150 |
Cooling water temperature |
- |
Recommendations into the water 18 ℃, water 25 ℃, standard temperature 20 ± 1 ℃ |
||
cooling tower |
- |
Pressure: 4Kg / cm2; pressure: 2Kg / cm2 |
||
Air Compressor |
- |
Of 3HP (air pressure: 6 ~ 8 Kg / cm2) |
||
Grounding resistance |
- |
5 ohms or less |
||
Power required |
- |
35KW |
40KW |
60KW |
Environmental needs |
One hundred thousand clean room environment; Epoxy plane of the floor; air conditioning; temperature 25 ± 3 ℃; humidity 50 ± 10% |
Systems / models |
LP-1500 EBA |
LP-1800 EBA |
||
size |
Diameter size |
1,500 mm |
1800 mm |
|
Fixture size |
∮1,400 mm |
∮1,600 mm |
||
Main Performance |
Ultimate vacuum |
10-7Torr / 10-5 Pa |
||
Operation of the vacuum degree |
(Empty furnace) 1 atm to about 30 minutes from 2x10-5 Torr |
|||
Substrate temperature |
350 deg.] C (max) |
|||
Exhaust System |
Rotary pump |
5,000 liters / minute |
6,000 liters / minute |
|
Strengthen Pump |
1,500M3 / hour |
2,600 M3 / hour |
||
Diffusion pump |
45,000 liters / x1 per second |
45,000 liters / x2 sec |
||
Ultra-low temperature freezers (Mining environmentally friendly refrigerant) |
-110 ~ -140 ℃ |
|||
Heating system |
Micro-heater |
36KW |
42KW |
|
Film thickness gauge |
Optical film thickness meter |
LP film thickness meter wide wave region |
||
Quartz film thickness meter |
Monolithic sensor head / six sensing head |
|||
Vacuum gauge |
- |
Pirani + Cold Cathode (1ATM ~ 10-9 Torr / 1ATM ~ 10-7 Pa) |
||
Evaporation source |
Electron gun |
JEOL or Plasmatech 6KW / 10KW / 15KW |
||
Resistance heating |
6KW |
|||
Rotary way |
- |
A planetary or revolving formula |
||
source of ion |
- |
Also optional |
||
Cooling water flow |
Liters / minute |
150 |
180 |
|
cooling tower |
- |
Pressure: 4Kg / cm2; pressure: 2Kg / cm2 |
||
Air Compressor |
- |
3 ~ 5HP (air pressure: 6 ~ 8 Kg / cm2) |
Pneumatic: 8 Kg / cm2 or more |
|
Grounding resistance |
- |
5 ohms or less |
||
Power control system |
- |
PLC + PC base (Windows System) |
||
Power required |
- |
80KW |
110KW |
|
Environmental needs |
One hundred thousand clean room environment; Epoxy plane of the floor; air conditioning; temperature 25 ± 3 ℃; humidity 50 ± 10% |