LP-EBA

Features:

English user interface easy and convenient.
Under computer control, with high reproducibility.
Thick high-performance optical monitor in conjunction with a computer, can reach ultra-high-precision optical thick.
Can be installed RF Ion source or Plasma Gun Ion Source for the high-order optical film vapor process.
Installation of automatic reverse mechanism works industry steaming time can be shortened, to achieve high productivity and reduce production costs.
Steamed automation system can enhance the production management personnel and reduce training time.

use:

Monocular / digital camera lens
Monitor / projector lens
Color filter / mirror
IR / UV filters
AR Coating
Cell phone camera
Monitor & readhead lens DVD

Systems / models		LP-900 EBA	LP-1100 EBA	LP-1300 EBA
size	Diameter size	900 mm	1100 mm	1300 mm
size	Fixture size	∮820 mm	∮950 mm	∮1200 mm
Main Performance	Ultimate vacuum	10-7 Torr / 10-5 Pa
	Operation of the vacuum degree	(Empty furnace) 1 atmosphere to 2x10-5 Torr (2.7X10-3 Pa) for about 30 minutes
	Substrate temperature	350 deg.] C (max)
Exhaust System	Rotary pump	3,000 liters / minute	3,000 liters / minute	3,000 liters / minute
	Strengthen Pump	600 M3 / hour	600 M3 / hour	1,500 M3 / hour
	Diffusion pump	20,000 liters / sec x 1	15,000 liters / sec x 2	45,000 liters / sec x 1
	Ultra-low temperature freezers	-110 ~ -140 ℃
Heating system	Micro-heater	12KW	12KW	24KW
Film thickness gauge	Optical film thickness meter	LP film thickness meter wide wave region 380mm ~ 1,050mm
Film thickness gauge	Quartz film thickness meter	Monolithic sensor head / six sensing head
Vacuum gauge	-	Pirani + Cold Cathode (1ATM ~ 10-9 Torr / 1ATM ~ 10-7 Pa)
Evaporation source	Electron gun	Plasmatech 6KW / 10KW
Evaporation source	Resistance heating	3KW	6KW	6KW
Rotary way	-	A planetary or revolving formula
source of ion	-	Also optional
cooling system	-	Pressure: 4Kg / cm2, pressure: 2Kg / cm2
Cooling water flow	Liters / minute	80	100	150
Cooling water temperature	-	Recommendations into the water 18 ℃, water 25 ℃, standard temperature 20 ± 1 ℃
cooling tower	-	Pressure: 4Kg / cm2; pressure: 2Kg / cm2
Air Compressor	-	Of 3HP (air pressure: 6 ~ 8 Kg / cm2)
Grounding resistance	-	5 ohms or less
Power required	-	35KW	40KW	60KW
Environmental needs	One hundred thousand clean room environment; Epoxy plane of the floor; air conditioning; temperature 25 ± 3 ℃; humidity 50 ± 10%

Systems / models		LP-1500 EBA		LP-1800 EBA
size	Diameter size	1,500 mm		1800 mm
	Fixture size	∮1,400 mm		∮1,600 mm
Main Performance	Ultimate vacuum	10-7Torr / 10-5 Pa
	Operation of the vacuum degree	(Empty furnace) 1 atm to about 30 minutes from 2x10-5 Torr
	Substrate temperature	350 deg.] C (max)
Exhaust System	Rotary pump	5,000 liters / minute		6,000 liters / minute
	Strengthen Pump	1,500M3 / hour		2,600 M3 / hour
	Diffusion pump	45,000 liters / x1 per second		45,000 liters / x2 sec
	Ultra-low temperature freezers (Mining environmentally friendly refrigerant)	-110 ~ -140 ℃
Heating system	Micro-heater	36KW	42KW
Film thickness gauge	Optical film thickness meter	LP film thickness meter wide wave region
	Quartz film thickness meter	Monolithic sensor head / six sensing head
Vacuum gauge	-	Pirani + Cold Cathode (1ATM ~ 10-9 Torr / 1ATM ~ 10-7 Pa)
Evaporation source	Electron gun	JEOL or Plasmatech 6KW / 10KW / 15KW
	Resistance heating	6KW
Rotary way	-	A planetary or revolving formula
source of ion	-	Also optional
Cooling water flow	Liters / minute	150		180
cooling tower	-	Pressure: 4Kg / cm2; pressure: 2Kg / cm2
Air Compressor	-	3 ~ 5HP (air pressure: 6 ~ 8 Kg / cm2)		Pneumatic: 8 Kg / cm2 or more
Grounding resistance	-	5 ohms or less
Power control system	-	PLC + PC base (Windows System)
Power required	-	80KW		110KW
Environmental needs	One hundred thousand clean room environment; Epoxy plane of the floor; air conditioning; temperature 25 ± 3 ℃; humidity 50 ± 10%