LP-EBA

Features:

  1. English user interface easy and convenient.
  2. Under computer control, with high reproducibility.
  3. Thick high-performance optical monitor in conjunction with a computer, can reach ultra-high-precision optical thick.
  4. Can be installed or Plasma Gun Ion Source for the high-order optical film vapor process.
  5. Installation of automatic reverse mechanism works industry steaming time can be shortened, to achieve high productivity and reduce production costs.
  6. Steamed automation system can enhance the production management personnel and reduce training time.

use:

  1. Monocular / digital camera lens
  2. Monitor / projector lens
  3. Color filter / mirror
  4. IR / UV filters
  5. AR Coating
  6. Cell phone camera
  7. Monitor & readhead lens DVD

Systems / models

LP-900 EBA

LP-1100 EBA

LP-1300 EBA

size

Diameter size

900 mm

1100 mm

1300 mm

Fixture size

∮820 mm

∮950 mm

∮1200 mm

Main Performance

Ultimate vacuum

10-7 Torr / 10-5 Pa

Operation of the vacuum degree

(Empty furnace) 1 atmosphere to 2x10-5 Torr (2.7X10-3 Pa) for about 30 minutes

Substrate temperature

350 deg.] C (max)

Exhaust System

Rotary pump

3,000 liters / minute

3,000 liters / minute

3,000 liters / minute

Strengthen Pump

600 M3 / hour

600 M3 / hour

1,500 M3 / hour

Diffusion pump

20,000 liters / sec x 1

15,000 liters / sec x 2

45,000 liters / sec x 1

Ultra-low temperature freezers

-110 ~ -140 ℃

Heating system

Micro-heater

12KW

12KW

24KW

Film thickness gauge

Optical film thickness meter

LP film thickness meter wide wave region 380mm ~ 1,050mm

Quartz film thickness meter

Monolithic sensor head / six sensing head

Vacuum gauge

-

Pirani + Cold Cathode (1ATM ~ 10-9 Torr / 1ATM ~ 10-7 Pa)

Evaporation source

Electron gun

Plasmatech 6KW / 10KW

Resistance heating

3KW

6KW

6KW

Rotary way

-

A planetary or revolving formula

source of ion

-

Also optional

cooling system

-

Pressure: 4Kg / cm2, pressure: 2Kg / cm2

Cooling water flow

Liters / minute

80

100

150

Cooling water temperature

-

Recommendations into the water 18 ℃, water 25 ℃, standard temperature 20 ± 1 ℃

cooling tower

-

Pressure: 4Kg / cm2; pressure: 2Kg / cm2

Air Compressor

-

Of 3HP (air pressure: 6 ~ 8 Kg / cm2)

Grounding resistance

-

5 ohms or less

Power required

-

35KW

40KW

60KW

Environmental needs

One hundred thousand clean room environment; Epoxy plane of the floor; air conditioning; temperature 25 ± 3 ℃; humidity 50 ± 10%

 

 

Systems / models

LP-1500 EBA

LP-1800 EBA

size

Diameter size

1,500 mm

1800 mm

Fixture size

∮1,400 mm

∮1,600 mm

Main Performance

Ultimate vacuum

10-7Torr / 10-5 Pa

Operation of the vacuum degree

(Empty furnace) 1 atm to about 30 minutes from 2x10-5 Torr

Substrate temperature

350 deg.] C (max)

Exhaust System

Rotary pump

5,000 liters / minute

6,000 liters / minute

Strengthen Pump

1,500M3 / hour

2,600 M3 / hour

Diffusion pump

45,000 liters / x1 per second

45,000 liters / x2 sec

Ultra-low temperature freezers

(Mining environmentally friendly refrigerant)

-110 ~ -140 ℃

Heating system

Micro-heater

36KW

42KW

Film thickness gauge

Optical film thickness meter

LP film thickness meter wide wave region

Quartz film thickness meter

Monolithic sensor head / six sensing head

Vacuum gauge

-

Pirani + Cold Cathode (1ATM ~ 10-9 Torr / 1ATM ~ 10-7 Pa)

Evaporation source

Electron gun

JEOL or Plasmatech 6KW / 10KW / 15KW

Resistance heating

6KW

Rotary way

-

A planetary or revolving formula

source of ion

-

Also optional

Cooling water flow

Liters / minute

150

180

cooling tower

-

Pressure: 4Kg / cm2; pressure: 2Kg / cm2

Air Compressor

-

3 ~ 5HP (air pressure: 6 ~ 8 Kg / cm2)

Pneumatic: 8 Kg / cm2 or more

Grounding resistance

-

5 ohms or less

Power control system

-

PLC + PC base (Windows System)

Power required

-

80KW

110KW

Environmental needs

One hundred thousand clean room environment; Epoxy plane of the floor; air conditioning; temperature 25 ± 3 ℃; humidity 50 ± 10%

21A en

Copyright © 2017. Lung Pien Rights Reserved Vacuum Industry Co., Ltd. All.
No.2 Datong Road, Wuchi District, Taichung City (Chungkang Export Processing Zone) 
Service E -mail: service@lp-vacuum.com.tw Business Consulting E -mail: sale@lp-vacuum.com.tw

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