COATING MATERIALS
CANON OPTRON | MgF2 / SiO / SiO2 / S5F / Al2O3 / OM-4 / Ta2O5 / OS-50 Surfclear100 etc. |
High Index | TiO2 / Ti3O5 / ZrO2 / ZnS / Ta2O5 / Nb2O5 etc. |
Medium Index | Al2O3 / MgO etc. |
Low Index | MgF2 / SiO2 etc. |
Mixture | LB-3 / ITO / OM type / OS type / OH type etc. |
AR Coating | AF.AS tablets / Super Hydrophobic etc. |
Consumables | BOAT(MO/TA/W) / TungstenFilament / Aluminum / Crucible etc. |
PUMP OIL
LEYBONOL | LVO-100 / LVO-130 / LVO-210 |
EDWARDS | Ultragrade 20/40 |
MORESCO | MR-100 / MR-200 / MR-200A / MR-250 / MR-250A |
HIVAC | Silicon oil |
DOW CORNING | Vacuum Grease |
LION | Lion-A / Lion-S |
CRYSTALS
MAXTEK | 6MHz(Gold/Alloy) / 5MHz(Gold/Alloy) |
INFICON | 6MHz(Gold/Alloy) / 5MHz(Gold/Alloy) |
LP | 6MHz(Gold/Alloy) / 5MHz(Gold/Alloy) |
FIL-TECH | QI-8010 / QI-8008 |
THIN FILM CONTROLLER
INFICON | XTC/3S、XTC/3M、IC6、SQM-160 |
SENSOR
JEOL | RotarySensorHead(6 points / 12 points) |
INFICON | SingleSensorHead / DualSensorHead etc. |
POWER SUPPLY
MF | (GERMAN) J.Schneider / (U.S.A) AE |
RF | (U.S.A) AE / (JAPAN) JEOL |
ION SOURCE(IAD)
VEECO | End Hall ION Source / RF ION Source |
KRI | End Hall ION Source / RF ION Source |
PPG | RF ION Source |
E BEAM
PLASMATECH | 6KW / 10KW / 15KW |
JEOL | 3KW/ 6KW/ 10KW / 16KW |
ULTRA-LOW-TEMPERATURE REFRIGERATOR
POLYCOLD | PFC-552 / PFC-672 / MAXCOOL 4000H |
SHINMAYWA | NEOCOLD RCT762 |
LP | LP-150-050 / LP-150-075 / LP-150-100 |
VACUUM PUMP
LEYBOLD | SV series / WAU series etc. |
EDWARDS | EH series / E2M175 / E2M275 etc. |
OSAKA | P600 / P901 / Tgkine series etc. |
PFEIFFER | WKP series etc. |
SHINKO | SMB series / SR series etc. |